Authors | Jong G. Ok, Young Jae Shin, Hui Joon Park*, L. Jay Guo* |
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Title | A Step Towards Next-Generation Nanoimprint Lithography: Extending Productivity and Applicability |
Journal | Applied Physics A |
Volume and page | 121, 343 (2015.11.01) |
Year of publication | 2015 |
Link | https://doi.org/10.1007/s00339-015-9229-6 |